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School of Eletronics Engineering
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Systems(MEMS) and
Chemical sensors
20.
Research facility / centre with
National recognition
1.
CENTER FOR NANOTECHNOLOGY AND RESEARCH
2.
NPMASS- MEMS DESIGN LAB
1.
CENTER FOR NANOTECHNOLOGY AND RESEARCH:
The Centre for Nanotechnology Research is equipped with state-of-the-art nano-
metrology equipment, advanced characterization, synthesis and simulation facilities.
The metrology equipment includes the Atomic Force Microscope (AFM), Scanning
Tunneling Microscope (STM), Scanning Probe Microscope (SPM) with many advance
features for characterizing nano-devices. A high resolution optical microscope to
observe submicron structures and conduct defect analysis, Electrochemical Workstation
for synthesis, chemical characterization and Lithographic facility for direct pattern
writing. The centre has many Advance Software Packages for device process modeling
and simulations. Stimulation of Electronic Devices on state-of-the- art parallel
computing environment has recently been created. The creations of all these facilities
have been funded by VIT with approximately Rs.150 lakhs investment.
The Centre has received a grant of Rs. 294 lakhs from DST, Government of India,
under Nano Science and Technology Initiative (NSTI) for the postgraduate teaching
programme (M.Tech). With this grant, the infrastructure and R&D facilities were
further enhanced with a Wet Chemical Lab set-up a thin Film Metal Evaporation unit,
Chemical Vapor Deposition Unit, Spin-coater, Rota-evaporator, High Speed Centrifuge,
Millipore Distill Water Plant, Precision 5-digit Weighing Balance, Microwave Oven,
Chemical Fume Hood, a Chemical Work Bench, Semiconductor Parameter Analyser
(SPA) and Advance Image Analysis Software. A Class 1000 Clean Room facility has
also been set up with partial funding from DST and VIT. Precision Electrical
measurements of Nanoscale devices with SPA and nano- Lithography set-up have also
been created. So far, 6 batches of M.Tech. students have been trained and most of them
are well placed in very good institutions in India and abroad, pursuing doctoral studies.
2.
NPMASS- MEMS DESIGN LAB
The MEMS design lab was started as an initiative towards research in the thrust area of
MEMS from the funding offered by National Program on Micro and Smart Systems
(NPMASS). Micro Electro Mechanical systems (MEMS) is the integration of mechanical
elements, sensors, actuators, and electronics on a common silicon substrate through micro
fabrication technology. There are a numerous possible applications for MEMS and Smart
Systems. Among many technologies that seem to have vast potential for application, MEMS
seems highly promising. Coupled with the smart materials and systems technology, MEMS
find applications from aerospace to automobile engineering, from environmental monitoring
to biomedical health sciences.
Names (and departments) of other faculty members involved
1.
Prof. Dr. Z. C. Alex, Sr. Professor, Director, Sponsored Projects
2.
Prof. Dr. J. P. Raina, Sr. Professor, CNR